Microwave
| Manufacturer | Description | Model No | Power(KW) |
|---|---|---|---|
| DAIHEN | MW Power Supply | ATP-10B | 1KW |
| MKS | MW Magnetron Head | SXRHC | 1.5KW |
| MKS | MW Magnetron Head | FI10002 | 1.5KW |
| DAIHEN | MW Magnetron Head | ATM-15C | 1.5KW |
| MKS | MW Generator | AX2115/S15ITBC | 1.5KW |
| DAIHEN | MW Power Supply | ATP-15B | 1.5KW |
| DAIHEN | MW Auto Tuner | SMA-15B | 1.5KW |
| MKS | Smart Match | FI20045 | 1.5KW |
| MKS | Smart Match | FI10001 | 1.5KW |
| MKS | DPS MW Detector | FI20032 | 1.5KW |
| DAIHEN | MW Auto Tuner | SMA-20B | 2KW |
| MKS | MW Magnetron Head | FI20162-1 FI20162-3 | 3KW |
| DAIHEN | MW Magnetron Head | ATM-30A | 3KW |
| MKS | Smart Power | FI20160-3 | 3KW |
| DAIHEN | MW Power Supply | ATP-30B | 3KW |
| DAIHEN | MW Auto Tuner | SMA-30D1 | 3KW |
| MKS | Smart Match | AX3060-10 | 3KW |
| MKS | Smart Match Module Detector | FI20607 | 3KW |
| DAIHEN | MW Magnetron Head | AKM-60B |
6KW |
| DAIHEN | MW Power Supply | AKP-60B | 6KW |
| MKS | DC Power Supply | ECOPS | 6KW |
